Micromechanical components for μTAS

The Modular Fluid System (MFS) concept as base system for the realization of Micro TAS, as well as a number of different micromechanical components for use in Micro TAS are presented. The correspondence of MFS to electronic breadboards is discussed, and an example of a possible "mixed" fluidic/electronic board is given. The consequences of downscaling for the operation of sensors in Micro TAS are discussed, and a number of components, sensors, sieves, mixers, valves and pumps are presented. Finally, the importance of the development of design tools and rules, especially bondgraph modelling, for MFS is emphasized