MME2010 21st Micromechanics and Micro systems Europe Workshop : Abstracts

The MME workshop is a well established and recognized European event in the field of Micromachining, Microengineering and Technology for the realization of micro-sensors and -actuators. At the MME workshop scientists and people from industry interested in the field gather annually. The goals are stimulation and improvement of know-how in the field, as well as the establishment of cooperation and friendship between all delegates. Thus MME is arranged so that people can meet in a friendly and informal atmosphere. Therefore the accent lies on mutual discussions around poster presentations rather than on formal oral presentations