Evaluation of adhesion promoters for Parylene C on gold metallization

Delamination of thin film polymeric coatings from metallization layers is a common cause of failure in biomedical implants. To address the problem, different adhesion promotion techniques can be applied which include surface pre-treatment with oxygen and argon plasma and the use of different adhesion promoters. In this paper the applicability of titanium (Ti), silicon oxide (SiOx), diamond-like carbon (DLC), tetramethylsilane (TMS) and aluminium oxide (AlOx) as adhesion promoters is evaluated. A cross cut, peel and scratch test are used to qualify and quantify the adhesion before and after storage in phosphate buffered saline (PBS) for 48 hours at a temperature of 37 °C. Promising results could be achieved by a combination of Ti and DLC as well as by AlOx