Examination of smooth surfaces roughness using angle scatterometer. Part 2. The experimental procedure. The measurement results of chosen surfaces

The experimental procedure for measurements of smooth surface roughness parameters using automated angle scatterometer, built at the Institute of Optoelectronics (IOE), is described. The results of measurements and their analysis for three chosen polished surfaces: silicon, germanium, and stainless steel are presented. The comparative investigations using scatteroscope SCAT-4 are performed. The repeatability and measurement range for built at IOE angle scatterometer is estimated.[b]Keywords[/b]: surface roughness, scattering, BSDF function, signature, scatteromete