Optimisation Design of Coupling Region Based on SOI Micro-Ring Resonator

Design optimization of the coupling region is conducted in order to solve the difficulty of achieving a higher quality factor (Q) for large size resonators based on silicon-on-insulator (SOI). Relations among coupling length, coupling ratio and quality factor of the optical cavities are theoretically analyzed. Resonators (R = 100 μm) with different coupling styles, concentric, straight, and butterfly, are prepared by the micro-electro-mechanical-systems (MEMS) process. Coupling experimental results show that micro-cavity of butterfly-coupled style obtains the narrowest (3 dB) bandwidth, and the quality factor has been greatly improved. The results provide the foundation for realization of a large size, high-Q resonator, and its development and application in the integrated optical gyroscopes, filters, sensors, and other related fields