Croissance et propriétés de couches minces d’oxydes pour microsources d’énergie

This thesis concerns the realization of oxide thin films and the study of their properties for photovoltaic or thermoelectric devices. In the first part, the TiOx properties are studied for use as an optically active transparent conductive oxide to put in front of the PV cells or, as optical coupling layer to interpose between the metal reflector and the absorbent layer of a PV cell. The layers are deposited by pulsed laser deposition (PLD). This method allows to get stoichiometric or oxygen deficient layers by controlling the oxygen partial pressure during the growth. The layers are doped with Nb to enhance electrical conductivity and/or with Nd for the conversion of Ultra-Violet photons to Near Infra-Red photons. Insulating and transparent layers, luminescent layers or conducting and absorbent layers are obtained. The TiO₁,₄₅₋₁,₆₀ films show polaronic or bipolaronic conductivity and exhibited the jump of electrical conductivity with jump height and temperature depending on the nature of the dopants. A second part of the manuscript concerns thermoelectricity in which the properties of cobalt calcium oxide are modulated for an efficient conversion of low temperature gradients centered at 300-365K. The control of the oxygen concentration of films allows to obtain the polymorphic phases CaxCoO₂,Ca₃Co₄O₉ and Ca₃Co₄O₆,₄₋₆,₈ having metallic or semiconducting behavior depending on the deposition temperature. The Ca₃Co₄O₆,₄₋₆,₈ films show high Seebeck coefficients (S) ≥ 1 000 μV/K and low electrical resistivity (3.8 to 6 mΩ.cm). Such interesting values have to be confirmed by additional experiments in order to be used as thermoelectric films.Cette thèse concerne la réalisation des films minces d’oxydes et l’étude de leurs propriétés physiques pour les cellules photovoltaïques (PV) et les modules thermoélectriques. Dans une première partie, les propriétés de l’oxyde de titane TiOx (1,45<x