Study of metal containing hydrogenated carbon films by STM/AFM and SAXS

Metal-containing amorphous hydrogenated carbon films are of high interest for industrial applications because of their excellent frictional properties, their high abrasive wear resistance and their electrical conductivity, which can be adjusted in a range of 10–12 orders of magnitude. In order to get insight into the mechanical and electrical properties it is necessary to study the nanostructure of the films. The structure consists of small nanometer sized metallic or carbidic particles, which are embedded in a three dimensional amorphous hydrogen-carbon matrix. Anomalous small angle X-ray scattering (ASAXS) and scanning tunneling microscopy (STM) have been used to determine size- and distance-distributions of the particles as a function of metal content. Problems and restrictions of both methods will be discussed. Furthermore the capabilities of scanning probe techniques to distinguish different materials on a nanometer scale (material contrast) have been studied employing barrier height imaging (dI/dz) and friction force microscopy