Characterization of multilayer systems by high-resolution x-ray diffraction

The x-ray diffraction pattern of MBE-grown Ga1−xAlxAs/GaAs superlattices has been measured withd-spacing resolutiond/Δd approaching 17000, corresponding to about 8500 Å−1. The resolution was achieved by employing a highly dispersive monochromator consisting of a pair of fivefold reflecting grooved silicon crystals which delivers about 104 photons s−1 to the sample. Detailed information like the presence of buffer layers, the molar fractionx, the numberp of layers, the superlattice periodtp, and the component layer thicknessest1,t2 are extracted from the measured pattern by comparing it with the pattern calculated from the dynamical theory for layer structures. In addition, the influence of disorder on the determination of the above superlattice parameters is investigated by including two different models of disorde