Some fluorinated gases (F-gases) which are used, or considered to be used, in crystalline silicon photovoltaic solar cell and film silicon module manufacturing have a very high global warming effect. CF4, C2F6, SF6 and NF3 have global warming potentials 7390, 12200, 22800 and 17200 times higher than CO2. These gases can be used in texturing, phosphorus silicate glass removal (PSG), edge isolation and reactor cleaning operations from which unreacted species and reaction byproducts will be emitted. An inventory of the current use of fluorinated greenhouse gases by the European and U.S.A. photovoltaic industry shows that CF4 may be used in edge isolation and C2F6 or SF6 or NF3 for reactor cleaning after deposition of silicon nitride or film si...
Photovoltaic (PV) systems are regarded as clean and sustainable sources of energy. Although the oper...
This paper addresses the influence of the chemical memory effect (CME) of in situ plasma cleaning by...
With a sharp increase in photovoltaic (PV) installations across the world, PV waste is now a relativ...
Some fluorinated gases (F-gases) which are used, or considered to be used, in crystalline silicon ph...
The circular economy and maximization of environmental sustainability are increasingly becoming the ...
The gases used in industrial cleaning processes are considered greenhouse gases with a high global w...
[[abstract]]The abatement of greenhouse gases from semiconductor processes is becoming important. Me...
The direct and indirect emissions associated with photovoltaic (PV) electricity generation are evalu...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
Fluorinated gases (F-gases) are widely used in the refrigeration industry and air conditioning equip...
In light of growing photovoltaic (PV) installation capacities around the world, and with it the incr...
The availability of polysilicon feedstock has become a major issue for the photovoltaic (PV) industr...
This report examines different alternatives for replacing, treating, and recycling greenhouse gases....
The target of this work was to find viable alternative CVD-cleaning gas mixtures for the semiconduct...
Plasma processing represents one possible solution to meet the requirements necessary for the realiz...
Photovoltaic (PV) systems are regarded as clean and sustainable sources of energy. Although the oper...
This paper addresses the influence of the chemical memory effect (CME) of in situ plasma cleaning by...
With a sharp increase in photovoltaic (PV) installations across the world, PV waste is now a relativ...
Some fluorinated gases (F-gases) which are used, or considered to be used, in crystalline silicon ph...
The circular economy and maximization of environmental sustainability are increasingly becoming the ...
The gases used in industrial cleaning processes are considered greenhouse gases with a high global w...
[[abstract]]The abatement of greenhouse gases from semiconductor processes is becoming important. Me...
The direct and indirect emissions associated with photovoltaic (PV) electricity generation are evalu...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
Fluorinated gases (F-gases) are widely used in the refrigeration industry and air conditioning equip...
In light of growing photovoltaic (PV) installation capacities around the world, and with it the incr...
The availability of polysilicon feedstock has become a major issue for the photovoltaic (PV) industr...
This report examines different alternatives for replacing, treating, and recycling greenhouse gases....
The target of this work was to find viable alternative CVD-cleaning gas mixtures for the semiconduct...
Plasma processing represents one possible solution to meet the requirements necessary for the realiz...
Photovoltaic (PV) systems are regarded as clean and sustainable sources of energy. Although the oper...
This paper addresses the influence of the chemical memory effect (CME) of in situ plasma cleaning by...
With a sharp increase in photovoltaic (PV) installations across the world, PV waste is now a relativ...