A new measurement method, called iTIRM, is presented. It is capable of measuring the surface quality, roughness and subsurface damage, of optical surfaces in a nondestructive way. Measurements have been carried out and are presented, showing the capability of iTIRM to quantify the quality of optical surfaces and to localize surface defects. The iTIRM measurement method is also suitable for in-situ measurements of optical surfaces during fabrication because it is nondestructive and is not obstructed by working tools required for the production process. The results of in-situ measurements will also be presented, showing that iTIRM is a useful tool for process investigation and process control
Optical surface profilometry is a technique that has advantages over other Profilometry techniques (...
Surface roughness is an important characteristic to determine how an object interact with the enviro...
Surface finish usually affects the quality, performance and lifetime of engineering products. With t...
A new method is presented that is capable of measuring the surface quality, including subsurface dam...
The possibilities of iTIRM, an in-process surface measurement tool, are explored in this research. E...
A new tool with which to monitor the quality (roughness and subsurface damage) of optical surfaces d...
A new method, iTIRM, is used for quantitative surface roughness measurements of ground and polished ...
AbstractProcesses for the production of optically smooth surfaces are very costly. This is due to a ...
The measurement of surface finish has been recognized as an important element of Computer Integrated...
The development of a material-specific technique to measure the subsurface damage (SSD) imparted dur...
In this paper, a comparative experimental surface roughness measurement method based on the speckle ...
In manufacturing engineering the surface finish of a machined component is of fundamental importance...
In this paper we present a feasible variant of a device for in-process roughness measurement during ...
An optical method is described that makes measurement of surface roughness of machined parts in a wi...
The surface structure, especially the roughness, has a significant influence on numerous parameters,...
Optical surface profilometry is a technique that has advantages over other Profilometry techniques (...
Surface roughness is an important characteristic to determine how an object interact with the enviro...
Surface finish usually affects the quality, performance and lifetime of engineering products. With t...
A new method is presented that is capable of measuring the surface quality, including subsurface dam...
The possibilities of iTIRM, an in-process surface measurement tool, are explored in this research. E...
A new tool with which to monitor the quality (roughness and subsurface damage) of optical surfaces d...
A new method, iTIRM, is used for quantitative surface roughness measurements of ground and polished ...
AbstractProcesses for the production of optically smooth surfaces are very costly. This is due to a ...
The measurement of surface finish has been recognized as an important element of Computer Integrated...
The development of a material-specific technique to measure the subsurface damage (SSD) imparted dur...
In this paper, a comparative experimental surface roughness measurement method based on the speckle ...
In manufacturing engineering the surface finish of a machined component is of fundamental importance...
In this paper we present a feasible variant of a device for in-process roughness measurement during ...
An optical method is described that makes measurement of surface roughness of machined parts in a wi...
The surface structure, especially the roughness, has a significant influence on numerous parameters,...
Optical surface profilometry is a technique that has advantages over other Profilometry techniques (...
Surface roughness is an important characteristic to determine how an object interact with the enviro...
Surface finish usually affects the quality, performance and lifetime of engineering products. With t...