Report on the Enabling Technology Programme Optomechatronics

The last four years the research Programme Optomechatronics focused on the development of new key technologies for manufacturing and testing equipment and scientific instrumentation. The challenge is to develop instruments with higher accuracy, less costs and higher throughput than we can achieve today. This is relevant for developing the next generation semiconductor equipment, for space and scientific instruments and for improving manufacturing equipment. Four research lines were conducted contributing to capabilities beyond conventional instruments and equipment