Add to ORKGEvolution of texture at growth of titanium nitride films prepared by photon and ion beam assisted deposition / J. W. Gerlach ... - In: Applied physics letters. 70. 1997. S. 1254-125
Microstructural investigations on titanium nitride films formed by medium energy beam deposition / W...
121 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2004.I use a combination of alloyi...
Highly sensitive in-situ monitoring of mechanical stress during ion-beam- assisted deposition of thi...
Evolution of texture at growth of titanium nitride films prepared by photon and ion beam assisted de...
Mechanical characterisation of titanium nitride films formed by low-energy ion beam assisted deposit...
[[abstract]]TiN, VN and CrN were systematically deposited on silicon substrates using ion beam assis...
Ion beam assisted deposition induced composition changes in titanium nitride / J. W. Gerlach ... - I...
Titanium nitride was formed by electron beam evaporation of titanium in an atmosphere of backfilled ...
Microstructural investigations on titanium nitride films formed by medium energy beam deposition / W...
121 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2004.I use a combination of alloyi...
Highly sensitive in-situ monitoring of mechanical stress during ion-beam- assisted deposition of thi...
Evolution of texture at growth of titanium nitride films prepared by photon and ion beam assisted de...
Mechanical characterisation of titanium nitride films formed by low-energy ion beam assisted deposit...
[[abstract]]TiN, VN and CrN were systematically deposited on silicon substrates using ion beam assis...
Ion beam assisted deposition induced composition changes in titanium nitride / J. W. Gerlach ... - I...
Titanium nitride was formed by electron beam evaporation of titanium in an atmosphere of backfilled ...
Microstructural investigations on titanium nitride films formed by medium energy beam deposition / W...
121 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2004.I use a combination of alloyi...
Highly sensitive in-situ monitoring of mechanical stress during ion-beam- assisted deposition of thi...