Preparation of Piezoelectric Material and Study of Piezoelectric Micro-Nano-Devices

压电材料的响应速度快，灵敏度高，在各个领域拥有广泛的应用，而压电纤维与压电薄膜又有尺寸小，柔顺性能优的特点得到了大量的研究。本文主要研究了压电纤维与压电薄膜的制备过程，对获得的薄膜进行表征分析，确定成分，然后将压电材料应用到MEMS微纳米器件当中。本文的主要内容及创新点如下：1.研究了静电纺丝法、溶胶凝胶法、溅射法制备的PZT压电薄膜。静电纺丝法制备了PZT纤维薄膜，实验设备自行搭建，采用了辅助电场以及平行板电极，并对改进的电场进行了对比仿真分析，自行搭建的电场在收集板附近电极更大，获得了取向较为一致的纤维，并对最终获得的薄膜进行了表征测试，结晶情况及表面情况都较好。溶胶凝胶法制备了PZT压电...Piezoelectric materials, such as piezoelectric fibers and thin films, are one of the most typical smart materials which are used various fields. This thesis studied the process of fabricating piezoelectric fibers and films. The films were characterized and analyzed by X-ray diffraction (XRD) and scanning electron microscope (SEM), and applied to the design of a piezoelectric micro-resonator and a ...学位：工学硕士院系专业：物理与机电工程学院_测试计量技术及仪器学号：1992012115270