Elaboration of strontium ruthenium oxide thin film on metal substrate by chemical solution deposition

International audienceIn order to improve the structural interface between a metal substrate and a lead zirconate titanate (Pb(ZrTi)O3, PZT) ferroelectric thin film, the elaboration of strontium ruthenium oxide (SrRuO3) by chemical solution deposition is studied. The SrRuO3 thin films were realized by multiple spin-coating technique and the temperature of the rapid thermal annealing process was optimized. The crystallization behavior was examined by X-ray diffraction; surface analyses using scanning electron microscope and atomic force microscope techniques showed the influence of the SrRuO3 layer at the interface PZT/metal on the morphology of the ferroelectric thin film. From the electrical measurements, a coercive electric field around 25 kV/cm and a remanent polarization of approximately 30 μC/cm were found