Preparation and characterization of barium strontium titanate thin films by chemical solution deposition

International audienceIn the present study, Ba 0.70 Sr 0.30 TiO 3 thin films were realized by chemical solution deposition based on the use of an alkoxide precursor. The solution is spin-coated onto stainless steel substrates and a classical multi-layer technique was used in order to obtain thicker films. The elaboration route is described and a study of the temperature dependence of the crystallization process is presented. The ferroelectric and the dielectric (permittivity and tanδ) properties were determined at different temperatures in order to determine the evolution of the tunability and the figure of merit of the films