High-performance silicon scanning mirror for laser printing

This paper describes the design, fabrication, and characterization of the first MEMS scanning mirror with performance matching the polygon mirrors currently used for high-speed consumer laser printing. It has reflector dimensions of 8mm × 0.75mm, and achieves 80° total optical scan angle at an oscillation frequency of 5kHz. This performance enables the placement of approximately 14,000 individually resolvable dots per line at a rate of 10,000 lines per second, a record-setting speed and resolution combination for a MEMS scanner. The scanning mirror is formed in a simple microfabrication process by gold reflector deposition and patterning, and through-wafer deep reactive-ion etching. The scanner is actuated by off-the-shelf piezo-ceramic stacks mounted to the silicon structure in a steel package. Device characteristics predicted by a mathematical model are compared to measurements