Overview of coherent optics applications in metrology

If optical methods are long time ago used in metrology, coming of laser sources has improved drastically the impact of optics in metrology. The progressive existence of more and more industrial optoelectronic components on the market is responsible of the actual introduction of optical technics in industrial processings like interferometric control, wide-ranging optical sensors, visual inspection.…. Further partial coherence and guiding properties of the light field, non linear optical comportment of the medium offer also interesting metrological applications. The aim of this paper is not to give a full description of all the optical methods used in metrology, but to draw some general specific properties and ideas illustrated by representative applications. © 1989, SPIE.SCOPUS: ar.j