Ion liquid chromatography on-a-chip with beads-packed parylene column

A parylene-MEMS ion-exchange Liquid Chromatography (LC) chip is presented here. The chip is integrated with microfluidic I/O ports, a separation column, frits/filters, and a conductivity detector. The column is packed with conventional LC stationary phase support materials, i.e. micro-beads with surface functional groups. To withstand high pressure normally encountered in high performance liquid chromatography (HPLC), a self-aligned, channel-anchoring technique is developed to increase the pressure rating of the parylene microfluidic devices from 30 to at least 800psi. On-chip injection, separation and detection of anions in water, with ~25 ppm concentration, have been successfully demonstrated. To our knowledge, this is the first demonstration of microbeads-packed column ion liquid Chromatography (LC) on a chip