Cantilevers With Integrated Actuators For Probe Microscopy

An atomic force microscopy sensor includes a substrate, a cantilever beam and an electrostatic actuator. The cantilever beam has a proximal end and an opposite distal end. The proximal end is in a fixed relationship with the substrate and the cantilever beam is configured so that the distal end is in a moveable relationship with respect to the substrate. The electrostatic actuator includes a first electrode that is coupled to the cantilever beam adjacent to the proximal end and a spaced apart second electrode that is in a fixed relationship with the substrate. When an electrical potential is applied between the first electrode and the second electrode, the first electrode is drawn to the second electrode, thereby causing the distal end of the cantilever beam to move.Georgia Tech Research Corporatio