Raw data for "Low-loss silicon slot waveguide realized by surface roughness reduction"

This dataset contains the raw data used for the figures in the paper Debnath K, Khokhar A, Reed G, Saito S. Low-loss silicon slot waveguide realized by surface roughness reduction. In 2016 IEEE 13th International Conference on Group IV photonics (GFP). Piscataway, US: IEEE. 2016. Available from DOI: 10.1109/GROUP4.2016.7739069 Abstract: We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented to the <;11-2> direction on the Si (110) plane are fabricated by a combination of dry and wet etching to realize propagation loss of 4dB/cm for a waveguide with a slot width of 120nm.