Determination of interstitial oxygen concentration in germanium by infrared absorption

The intensities of infrared absorption due to the asymmetric stretching vibrations of interstitial oxygen atoms in Ge crystals enriched with O-16 and O-18 isotopes have been compared with oxygen concentrations determined by means of secondary ion mass spectrometry. For Ge samples with oxygen content less than 5 x 10(17) cm(-3), a good correlation has been found between the values of oxygen concentration and the values of the absorption coefficient at the maximum of the O-16(i) related absorption band at 855.6 cm(-1) with a proportionality coefficient C-O = 1.05 x 10(17) cm(-2). (c) 2006 American Institute of Physics