In this study we will report on the development of a process to establish antisticking layers on nickel-based stamps, which are used in several industrial applications of nanoimprint lithography or related methods. The fluorinated alkyl silane films have been deposited onto different Ni-based stamp surfaces in order to minimize the adhesion tendency at the stamp/polymer interface. film thickness, chemical composition, purity, and binding mechanisms of the silane groups to different stamp surface materials have been determined by photoelectron spectroscopy (XPS). In the case of electroplated nickel stamps-where low imprint qualities are observed-multilayer thick films cover, the stamp surfaces, consisting of polymerized, cross-linked alkyl s...
We present two alternative methods for fabrication of nanoimprint lithography stamps in SiO2 with su...
This thesis describes different aspects of nanotechnology manufacturing with nanoimprint lithography...
[[abstract]]Hydrogen silsesquioxane (HSQ) soft stamps with hard upper-part protruding areas are prop...
Thin films of different derivatives of fluorinated alkyl phosphoric acids have been deposited from a...
The smaller the features on the stamp the more important are the interactions between stamp and poly...
Hydrophobic silane coatings have been successfully applied to the surface of Si stamps to improve de...
Conventional lithography using photons and electrons continues to evolve to scale down three-dimensi...
The nanoimprinting is a potential method for submicron scale patterning for various applications, fo...
This diploma thesis deals with the investigation of the metal-assisted catalytic etching (MaCE) of S...
In this work we have investigated and developed an uncomplicated one step fabrication method to cons...
Biomimetic structures such as structural colors demand a fabrication technology of complex three-dim...
Combined nanoimprint and photolithography (CNP) is an attractive imprint technology for residual lay...
In this work we report of SSIL approach to fabricate a master for nickel stamp. Using this method we...
Nanoimprint lithography (NIL) is a nonconventional lithographic technique that promises low-cost, hi...
We present a systematic comparison of four resins for nanoimprint intermediate polymer stamps, the s...
We present two alternative methods for fabrication of nanoimprint lithography stamps in SiO2 with su...
This thesis describes different aspects of nanotechnology manufacturing with nanoimprint lithography...
[[abstract]]Hydrogen silsesquioxane (HSQ) soft stamps with hard upper-part protruding areas are prop...
Thin films of different derivatives of fluorinated alkyl phosphoric acids have been deposited from a...
The smaller the features on the stamp the more important are the interactions between stamp and poly...
Hydrophobic silane coatings have been successfully applied to the surface of Si stamps to improve de...
Conventional lithography using photons and electrons continues to evolve to scale down three-dimensi...
The nanoimprinting is a potential method for submicron scale patterning for various applications, fo...
This diploma thesis deals with the investigation of the metal-assisted catalytic etching (MaCE) of S...
In this work we have investigated and developed an uncomplicated one step fabrication method to cons...
Biomimetic structures such as structural colors demand a fabrication technology of complex three-dim...
Combined nanoimprint and photolithography (CNP) is an attractive imprint technology for residual lay...
In this work we report of SSIL approach to fabricate a master for nickel stamp. Using this method we...
Nanoimprint lithography (NIL) is a nonconventional lithographic technique that promises low-cost, hi...
We present a systematic comparison of four resins for nanoimprint intermediate polymer stamps, the s...
We present two alternative methods for fabrication of nanoimprint lithography stamps in SiO2 with su...
This thesis describes different aspects of nanotechnology manufacturing with nanoimprint lithography...
[[abstract]]Hydrogen silsesquioxane (HSQ) soft stamps with hard upper-part protruding areas are prop...