Add to ORKGWe report a new, fast and versatile method to fabricate nanochannels with non-uniform depth in a single step, in the range 50-500nm. The process is based on maskless laser lithography to structure a photosensitive resist (PR). The lateral dimension can be as small as 2µm. Functional nanofluidic chips with slopes, steps, and pore networks mimicking a nanoporous medium were fabricated and tested
Nanochannel devices have been fabricated using standard micromachining techniques such as optical li...
Nanofluidics can be defined as the study of the behavior, manipulation and control of fluids confin...
Abstract: Nanofluidic devices have great potential for applications in areas ranging from renewable ...
International audienceWe report a new, fast and versatile method to fabricate nanochannels with non-...
International audienceA method is reported to fabricate silicon-glass nanofluidic chips with non-uni...
Nanofluidics is the science and technology involving a fluid flowing in or around structures with a ...
Photolithography of multi-level channel features in microfluidics is laborious and/or costly. Graysc...
This paper introduced a wafer-scale fabrication approach for the preparation of nanochannels with hi...
Figure 1. A scheme of nanochannel fabrication with roof collapsed mask. PDMS mask has a nanoslit pat...
∗This paper reports a novel laser processing technique for making channels in the nano regime. A Nd:...
Nanofluidic devices have great potential for applications in areas ranging from renewable energy to ...
The endeavour to develop nanodevices demands for patterning methods in the nanoscale. To bring nanod...
Nanofluidics is supposed to take advantage of a variety of new physical phenomena and unusual effect...
Nanofluidic devices have typically explored a design space of patterns limited by a single nanoscale...
Nanofluidic devices are of great interest due to their promising applications in biological/chemical...
Nanochannel devices have been fabricated using standard micromachining techniques such as optical li...
Nanofluidics can be defined as the study of the behavior, manipulation and control of fluids confin...
Abstract: Nanofluidic devices have great potential for applications in areas ranging from renewable ...
International audienceWe report a new, fast and versatile method to fabricate nanochannels with non-...
International audienceA method is reported to fabricate silicon-glass nanofluidic chips with non-uni...
Nanofluidics is the science and technology involving a fluid flowing in or around structures with a ...
Photolithography of multi-level channel features in microfluidics is laborious and/or costly. Graysc...
This paper introduced a wafer-scale fabrication approach for the preparation of nanochannels with hi...
Figure 1. A scheme of nanochannel fabrication with roof collapsed mask. PDMS mask has a nanoslit pat...
∗This paper reports a novel laser processing technique for making channels in the nano regime. A Nd:...
Nanofluidic devices have great potential for applications in areas ranging from renewable energy to ...
The endeavour to develop nanodevices demands for patterning methods in the nanoscale. To bring nanod...
Nanofluidics is supposed to take advantage of a variety of new physical phenomena and unusual effect...
Nanofluidic devices have typically explored a design space of patterns limited by a single nanoscale...
Nanofluidic devices are of great interest due to their promising applications in biological/chemical...
Nanochannel devices have been fabricated using standard micromachining techniques such as optical li...
Nanofluidics can be defined as the study of the behavior, manipulation and control of fluids confin...
Abstract: Nanofluidic devices have great potential for applications in areas ranging from renewable ...