Preparation and characterization of antiferroelectric PZT thin films on steel substrates using intermediate oxide layers

International audienceAntiferroelectric lead zirconate titanate PZT (95/5) has been prepared by chemical solution deposition using alkoxide precursor compounds and was spin-coated on metallic substrates of Hastelloy. In order to better adapt the substrate to the PZT and thus to improve the crystallization behavior of the PZT films, different interface layers have been studied. The annealing parameters have been optimized in the case of an intermediate RuO 2 layer. Other interface layers like indium tin oxide (ITO) or lanthanum strontium manganate (LSMO) can be compared to deposition of the PZT on Hastelloy and on platinum coated Hastelloy. Using conventional multi-coating technique, homogeneous antiferroelectric films of up to 2.5 w m thickness have been obtained