Fabrication and Packaging Technologies of Love-wave-based Microbalance for Fluid Analysis

AbstractQuartz crystal microbalance (QCM) based techniques have been developed for years to address various kinds of biochemical analyses in liquid media. An alternative to this approach based on guided acoustic shear waves, the socalled Love wave devices, has been proved to allow for increasing gravimetric sensitivity. However, this approach reveals more complicated to implement as the surface on which reactions are achieved is the same as the one used for electrical connection. As a consequence, a microfluidic set-up must be implemented to prevent unwanted interactions between the corresponding areas (IDTs and propagation path). The main issue when using SAW Sensors for in-liquid biochemical analyses [1-4], especially in a commercial objective, is the development of a reliable and reproducible fluidic system [5] meeting the main following requirements: i) low acoustic leakage. ii) chemically inert to biological samples. iii) reproducible fabrication at the wafer scale level.In the present work we explore the use of the SU-8 epoxy-based photoresist combined with silicon or quartz machined covers for the fabrication of this fluidic circuit. A first structure is fabricated using deep etch lithography, the cover is then glued to the remaining SU-8 structure using a thin glue layer. The packaging system prevents covering the IDTs with liquids and defines the sensing area in the region in-between the IDTs. Once the fabrication achieved, we evaluate the velocity and propagation loss using a network analyzer to measure the influence of the proposed packaging approaches on the principal wave characteristics