Pure business

AbstractTaiwan’s United Epitaxy Company (UEC) has eight HTG 40 hydrogen purifiers installed at its new fab. Supplied by Johnson Matthey’s Gas Purification Technology Group (JMGPT), the hydrogen purifiers will supply ultrapure hydrogen to UEC’s MOCVD reactors. Specifically for UEC, JMGPT designed units which allow two HTG 40s to be mounted in the same frame, resulting in an HTG 80, able to handle a flow of hydrogen up to 60 Nm3/hr.This is a short news story only. Visit www.three-fives.com for the latest advanced semiconductor industry news