Micro Machining for Micro Electro Mechanical Systems (MEMS)

AbstractThis paper studies on micro fabrication methods for MEMS. Silicon micromachining has been a key factor for the vast progress of MEMS. Silicon micromachining refers to fashioning microscopic mechanical parts out of a silicon substrate or on a silicon substrate. Silicon micromachining comprises two technologies: bulk micromachining, in which structures are etched into silicon substrate and surface micromachining, in which the micromechanical layers are formed from layers and films deposited on the surface. Bulk micromachining and surface micromachining are the two major micromachining processes of silicon, and silicon wafer bonding is usually necessary for silicon microfabrication. LIGA and 3D microfabrications have been used for high aspect ratio and 3D-microstructure fabrication for MEMS