Low Polarization Voltage and High Sensitivity CMOS Condenser Microphone Using Stress Relaxation Design

AbstractIn this paper, a CMOS condenser microphone with high sensitivity and low polarization voltage was designed, simulated and fabricated. Due to CMOS process temperature variant and lattice defects, the poly-membrane would be invoked normal stress and gradient stress. These two residual stresses would deform the membrane and increase the membrane's rigidity. For these concerns, an interlace slots design is utilized to reduce the normal stress up to 90%, and the annealing process is applied to decrease the gradient stress. The acoustical sensitivity was increased considerably to -45dBV at 2.7V bias voltage, and, the noise level is -85dBV at 1KHz