Surface wave in ZnO/SiO2/Si piezoelectric structure

AbstractThe propagation of Love surface waves in the layered piezoelectric media was analyzed through the method of stiffness matrix. Firstly, the governing equations of motion for the piezoelectric media are derived on the basis of fundamental acoustic tensor. Secondly, the stiffness matrix for the surface waves in the piezoelectric media is presented. Solutions are obtained by the stiffness matrix method. Thirdly, numerical calculations are given for the ZnO/SiO2/Si structure. It is found that the middle layer SiO2 affects the phase velocity. These results are useful in the surface acoustic wave area