A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators

AbstractA silicon micromirror driven by a piezoelectric Pb(Zr,Ti)O3 beam actuator has been demonstrated for two-dimensional scanning mirror applications. The mirror is micromachined from the device layer of an SOI wafer, while the piezoelectric beam actuator contains multilayers of Pt/Ti/PZT/Pt/Ti/SiO2/Si which is deposited and released from a SOI wafer. A 1x10 PZT arrayed actuator are separately arranged in parallel on a Si beam. Bending mode is measured at 34Hz as while the torsional mode is measured at 197Hz. We demonstrated 2-D raster scanning patterns by applying AC bias of 34Hz on half of the 10 actuators and 197Hz on the other half actuators