Polygon Scanner System for Ultra Short Pulsed Laser Micro-Machining Applications

AbstractUltra short pulsed lasers have gained acceptance in micro-machining applications and many processes have been developed in the lab. Transferring the technology to the manufacturing floor started few years ago as soon as relatively high average power (> 5W) lasers became available. Now that high repetition rates and average powers of 50 Watt and more are reaching the market, the commercially available galvo based laser scanners systems limit the efficient use of this expensive laser power. We present a novel polygon based scanner system incorporating laser and scanner synchronization enabling writing speeds of 50 m/sec and higher