Thermal Compensated Pull-in Voltage MEMS Inclinometers

AbstractThe study of temperature effects on pull-in voltage-based inclinometers is reported here. A 75μ°-resolution MEMS inclinometer that uses pull-in voltages as the transduction mechanism is tested at different temperatures and inclinations. The microstructures used have differential actuation electrodes enabling the measurement of two pull-in voltages that change with acceleration. Both the difference between left and right pull-in voltages (used to measure the inclination) and the nominal pull-in voltage (in absence of inclination) are retrieved and used for thermal compensation. Experimental results demonstrate a compensated inclinometer with high-resolution and with thermal stability better than 0.01%FS