Gas chromatography-mass spectrometric identification of impurities in silane of natural isotopic composition and enriched with ²⁸Si isotope

Методом хромато-масс-спектрометрии проведена идентификация примесей в силане природного и изотопно-обогащенного состава. Идентифицировано 40 примесных веществ, из них 21 установлено впервые. Получены и охарактеризованы масс-спектры тетра- и пентасиланов, фторпроизводных дисилоксана, три- и тетрасилоксанов.The gas chromatography-mass spectrometry was used for determination of impurities in silane of natural and isotopically enriched composition. 40 impurity substances were identified with 21 impurities being found for the first time. Mass spectra of tetra- and pentasilanes, fluorine-derivatives of disiloxane, tri- and tetrasiloxanes were obtained and characterized