Biomimetic polymer MEMS haircells with high-aspect ratio for high accuracy flow sensing
- Kottapalli, A. G. P
- Asadnia, M
- Miao, J. M
- Triantafyllou, M. S
Publication date
January 2013
DOI Publisher
Institute of Electrical and Electronics Engineers (IEEE)Abstract
This paper presents the fabrication and testing of a bio-inspired polymer MEMS flow sensor. The sensor consists of a liquid crystal polymer (LCP) sensing membrane and a polymer haircell that extends into the flow. High-aspect ratio Si60 polymer haircells are fabricated by stereolithography. The device demonstrates high sensitivity in the air and water flow velocity sensing tests that are conducted.4 page(s
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