Low temperature boron and phosphorous diffusion gettering (BDG and PDG) of iron in Czochralski-grown silicon were experimentally studied. Differences and similarities between the gettering techniques were clarified by using intentionally iron contaminated wafers emphasizing especially the effect of oxygen. Experiments showed that the surprisingly high gettering effects of BDG could be explained by B-Si precipitates. Oxygen precipitation was seen to decrease minority carrier diffusion length after long gettering at low temperatures in both BDG and PDG. In the case of BDG oxygen precipitation affected more as a higher thermal budget was needed to obtain similar sheet resistance to that of PDG. According to experiments the efficiency of BDG ca...
The deteriorated area of the multicrystalline silicon (mc-Si) ingots grown by directional solidifica...
In this paper, a model is presented for boron diffusion gettering of iron in silicon during thermal ...
We present here experimental results on the gettering of iron in Czochralski-grown silicon by phosph...
Low temperature boron and phosphorous diffusion gettering (BDG and PDG) of iron in Czochralski-grown...
We have studied the boron diffusion gettering (BDG) of iron in single crystalline silicon. The resul...
We have studied experimentally the phosphorus diffusion gettering (PDG) of iron in monocrystalline s...
We have studied the boron diffusion gettering (BDG) of iron in single crystalline silicon. The resul...
Effects of iron and copper impurities on the amount of precipitated oxygen and the oxide precipitate...
Phosphorus diffusion is well known to getter effectively metal impurities during silicon solar cell ...
We propose a quantitative model for phosphorus diffusion gettering (PDG) of iron in silicon, which i...
Effects of iron and copper impurities on the amount of precipitated oxygen and the oxide precipitate...
Phosphorus implantation can provide a direct route to a high-performing emitter, with no surface dea...
In this paper, a model is presented for boron diffusion gettering of iron in silicon during thermal ...
We have studied experimentally the effect of different initial iron contamination levels on the elec...
We present here experimental results on the gettering of iron in Czochralski-grown silicon by phosph...
The deteriorated area of the multicrystalline silicon (mc-Si) ingots grown by directional solidifica...
In this paper, a model is presented for boron diffusion gettering of iron in silicon during thermal ...
We present here experimental results on the gettering of iron in Czochralski-grown silicon by phosph...
Low temperature boron and phosphorous diffusion gettering (BDG and PDG) of iron in Czochralski-grown...
We have studied the boron diffusion gettering (BDG) of iron in single crystalline silicon. The resul...
We have studied experimentally the phosphorus diffusion gettering (PDG) of iron in monocrystalline s...
We have studied the boron diffusion gettering (BDG) of iron in single crystalline silicon. The resul...
Effects of iron and copper impurities on the amount of precipitated oxygen and the oxide precipitate...
Phosphorus diffusion is well known to getter effectively metal impurities during silicon solar cell ...
We propose a quantitative model for phosphorus diffusion gettering (PDG) of iron in silicon, which i...
Effects of iron and copper impurities on the amount of precipitated oxygen and the oxide precipitate...
Phosphorus implantation can provide a direct route to a high-performing emitter, with no surface dea...
In this paper, a model is presented for boron diffusion gettering of iron in silicon during thermal ...
We have studied experimentally the effect of different initial iron contamination levels on the elec...
We present here experimental results on the gettering of iron in Czochralski-grown silicon by phosph...
The deteriorated area of the multicrystalline silicon (mc-Si) ingots grown by directional solidifica...
In this paper, a model is presented for boron diffusion gettering of iron in silicon during thermal ...
We present here experimental results on the gettering of iron in Czochralski-grown silicon by phosph...