Fabrication of Micro Nozzles and Micro Pockets by Electrochemical Micromachining

The aim of this study is to fabricate micro nozzles and micro pockets by electrochemical micromachining (μECM) process. To achieve the goal, tungsten micro-shafts of 0.38 mm are electrochemically etched to fabricate desired dimension microtool with conical tip. In the fabrication of microtool, electrolyte concentrations are varied in the range to 0.08 to 2.0 M KOH for the applied potential differences of 9 V and 15 V AC and different etching time. The microtool fabrication process has been monitored by measuring the size, shape and overall tool geometry. Finally, the tools fabricated have been used for micro nozzle and micro pocket on nickel plates. Entrance and exit diameters of micro nozzles fabricated are measured by SEM and compared to tool geometry