Role of microstructure in porous silicon gas sensors for NO2

The sensing performace, light scattering, and Transmission electron microscopy (TEM) images of porous silicon were investigated. It was suggested that the structure of porous silicon was determinant towards high sensitivity to NO2. A way to change the structure was by modifying the composition of the electrochemical solution. It was found that the way to achieve the best results was by using ethanoic solutions with HF concentration levels between 12% and 13%