All-solid-state 3D integrated batteries can reach the energy storage capacity required for future wireless devices by exploiting the third dimension. Conformal deposition techniques such as atomic layer deposition (ALD) are needed to deposit the battery materials. In this work, the current development of ALD processes for 3D integrated batteries is reviewed. We have developed both the TiN diffusion barrier and Pt cathode current collector processes. TiN showed good barrier properties in 3D, although a higher than expected charge density was observed, which could be attributed to a lower thickness and/or different material properties at the bottom of the 3D structures. The remote plasma ALD process for Pt showed fast growth initiation and go...
considered as very promising solid-state lithium ion conductors and are foreseen to replace lithium ...
This paper will report on the electrochemical and material characterization of a potential planar an...
Three-dimensional thin-film solid-state batteries (3D TSSB) were proposed by Long <i>et al</i>. in 2...
All-solid-state 3D integrated batteries can reach the energy storage capacity required for future wi...
3D solid-state batteries are receiving great attentions as on-board power supply systems for small-d...
One major difficulty in maintaining the size reduction in electronic devices is the controlled depos...
Nanostructuring is targeted as a solution to achieve the improvements required for implementing Li-i...
Atomic layer deposition (ALD) technique is a thin film deposition method that provides highly confor...
International audienceNowadays, millimeter scale power sources are key devices for providing autonom...
To investigate the feasibility of a 3D integrated all-solid-state micro-battery, the deposition of s...
Current trends in device miniaturization and portability put strong requirements on energy storage d...
All solid state 3D batteries are pursued for their increased safety and high power capabilities. At ...
All solid state 3D batteries are pursued for their increased safety and high power capabilities. At ...
considered as very promising solid-state lithium ion conductors and are foreseen to replace lithium ...
This paper will report on the electrochemical and material characterization of a potential planar an...
Three-dimensional thin-film solid-state batteries (3D TSSB) were proposed by Long <i>et al</i>. in 2...
All-solid-state 3D integrated batteries can reach the energy storage capacity required for future wi...
3D solid-state batteries are receiving great attentions as on-board power supply systems for small-d...
One major difficulty in maintaining the size reduction in electronic devices is the controlled depos...
Nanostructuring is targeted as a solution to achieve the improvements required for implementing Li-i...
Atomic layer deposition (ALD) technique is a thin film deposition method that provides highly confor...
International audienceNowadays, millimeter scale power sources are key devices for providing autonom...
To investigate the feasibility of a 3D integrated all-solid-state micro-battery, the deposition of s...
Current trends in device miniaturization and portability put strong requirements on energy storage d...
All solid state 3D batteries are pursued for their increased safety and high power capabilities. At ...
All solid state 3D batteries are pursued for their increased safety and high power capabilities. At ...
considered as very promising solid-state lithium ion conductors and are foreseen to replace lithium ...
This paper will report on the electrochemical and material characterization of a potential planar an...
Three-dimensional thin-film solid-state batteries (3D TSSB) were proposed by Long <i>et al</i>. in 2...