− 337 − Characteristics of SAW humidity sensor using nanocrystalline ZnO films

In this work, the nanocrystalline ZnO/polycrystalline(poly) aluminum nitride(AlN) / Si-layered structure was fabricated for humidity sensor applications based on surface acoustic wave(SAW). The ZnO film was used as a sensitive material layer. The ZnO and AlN(0002) were deposited by a sol-gel process and a pulse reactive magnetron sputtering, respectively. The ZnO sensitive films coated on AlN have a hexagonal wurtzite structure after the thin films annealed at 400