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Keywords: high-purity synthetic silica glass with high refractive index homo-geneity [1,2], which is crucially affected by the size, morphology and chemical composition of the formed silica droplets [3]. FHD method followed by a rapid consolidation at 1380 C in vacuum ambiance has been shown to be capable of fabricating thick silica glass film up to 37 lm with a high deposition rate of 8 lm/min, which has a rather uniform refractive index 1.4456 ± 0.0005 in rption coefficient avelength hesis is a p nd engin Detailed diagnostic analysis of the process with the conc chemistry, transport and particle dynamics would ine advance the understanding and technical control of the ma ture of fumed silica. However, experimental diagnosis on the droplet existing multiphase flame is mainly limited by the short residence times of chemical reaction and particle growth, as well as the high process temperature [3]. Since the formation and growth of silica droplets are highly coupled with the temperatur