Numerical study on the heat dissipation of a vacuum compatible motor

We developed a novel cylindrical magnetic levitation stage that provides rotational motion with high precision in a vacuum environment. The heat dissipation from a magnetic levitation stage is investigated numerically. In order to facilitate heat transfer from the inner space vacuum, a copper pipe is inserted in the coil base of the stator to circulate cooling water. The modules are analyzed using the finite element method (FEM) to determine the effects of the electrical current and the flow velocity of the cooling water. The results indicate that the augmentation of the cooling pipe brings about a significant enhancement in the heat dissipation performance of the magnetic levitation stage. The coil temperature is shown to decrease as the flow rate increases, or as the current decreases. The proposed cooling scheme sheds light on an optimal design for a vacuum-based electromagnetic system. This, in turn, could significantly affect next-generation semiconductor manufacturing.ope