Characteristics of ITO thin films for organic light emitting diode by using a low-frequency magnetron sputtering method
- Kim, Myung Chan
- Sohn, Sang Ho
- Park, Duck Kyu
- Jung, Sang Kooun
- Kim, Eun Lyoung
- Lee, Yun Su
- Hur, Youngjune
- Park, Lee Soon
- Choi, Kyu-Han
Publication date
November 2015
DOI Publisher
Informa UK Limited ISSN
1542-1406 Journal
Molecular Crystals and Liquid Crystals Citation count (estimate)
1Abstract
In this study, we have tried the growth of indium tin oxide (ITO) thin films by using low-frequency magnetron sputtering method (LFMSM). Characteristics of ITO thin films deposited on polyethersulfone (PES) and polyetyleneterephthalate (PET) substrates arc, investigated. Experiments were carried out as a function of deposition time. With increasing the deposition time of the ITO thin films on PES substrate, the sheet resistance is decreased. ITO thin films on polymer substrates were amorphous structureclose2
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