Add to ORKGPart of the American Studies Commons This Thesis is brought to you for free and open access by the Graduate School at Scholar Commons. It has been accepted for inclusion in Graduate Theses and Dissertations by an authorized administrator of Scholar Commons. For more information, please contact scholarcommons@usf.edu. Scholar Commons Citation Deva Reddy, Jayadeep, "Mechanical properties of Silicon Carbide (SiC) thin films " (2008). Graduate Theses and Dissertations
PECVD method was adopted to deposit amorphous SiC thin films. Furthermore, capacitance resonators an...
The mechanical properties of WC-SiC thin films deposited by dual radio frequency magnetron sputterin...
Polycrystalline silicon carbide films have been prepared by the gas tunnel type plasma spraying meth...
There is a technological need for hard thin films with high elastic modulus. Silicon Carbide (SiC) f...
Silicon carbide (SiC) is a material with excellent properties for micro systems applications. In thi...
Silicon carbide (SiC) is widely recognized as the leading candidate to replace silicon in micro-elec...
The mechanical properties and fracture behavior of silicon carbide (3C-SiC) thin films grown on sili...
This Dissertation is brought to you for free and open access by the Graduate School at Scholar Commo...
This paper reports the mechanical properties and fracture behavior of silicon carbide (3C-SiC) thin ...
Cubic silicon carbide films grown by chemical vapor deposition (CVD) on silicon substrates typically...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Civil Engineering, 1990.Includes bi...
indentation hardness. Abstract. Silicon oxycarbide(SiCO)thin films are a kind of glassy compound mat...
Silicon carbide (SiC) thin films were prepared by Hot Wire Chemical Vapor Deposition (HWCVD) from Si...
Development of thin films has allowed for important improvements in optical, electronic and electrom...
Silicon oxycarbide is a versatile material system that is attractive for many applications because o...
PECVD method was adopted to deposit amorphous SiC thin films. Furthermore, capacitance resonators an...
The mechanical properties of WC-SiC thin films deposited by dual radio frequency magnetron sputterin...
Polycrystalline silicon carbide films have been prepared by the gas tunnel type plasma spraying meth...
There is a technological need for hard thin films with high elastic modulus. Silicon Carbide (SiC) f...
Silicon carbide (SiC) is a material with excellent properties for micro systems applications. In thi...
Silicon carbide (SiC) is widely recognized as the leading candidate to replace silicon in micro-elec...
The mechanical properties and fracture behavior of silicon carbide (3C-SiC) thin films grown on sili...
This Dissertation is brought to you for free and open access by the Graduate School at Scholar Commo...
This paper reports the mechanical properties and fracture behavior of silicon carbide (3C-SiC) thin ...
Cubic silicon carbide films grown by chemical vapor deposition (CVD) on silicon substrates typically...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Civil Engineering, 1990.Includes bi...
indentation hardness. Abstract. Silicon oxycarbide(SiCO)thin films are a kind of glassy compound mat...
Silicon carbide (SiC) thin films were prepared by Hot Wire Chemical Vapor Deposition (HWCVD) from Si...
Development of thin films has allowed for important improvements in optical, electronic and electrom...
Silicon oxycarbide is a versatile material system that is attractive for many applications because o...
PECVD method was adopted to deposit amorphous SiC thin films. Furthermore, capacitance resonators an...
The mechanical properties of WC-SiC thin films deposited by dual radio frequency magnetron sputterin...
Polycrystalline silicon carbide films have been prepared by the gas tunnel type plasma spraying meth...