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Use of spectroscopic ellipsometry for feedback control during the growth of thin AlAs layers

Publication date

January 1999

DOI

10.1116/1.590728

Publisher

American Vacuum Society

ISSN

0734-211X

Language

English

Abstract

Copyright 1999 American Vacuum Society. Link to the original site http://scitation.aip.org/content/avs/journal/jvstb/17/3/10.1116/1.59072

Extracted data

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