Design and Realization of the Second Generation Imaging Reflectometer and its Application in Optical Analysis of Thin Films

The work deals with a technique of imaging spectroscopic reflectometry developed at The Institute of Physical Engineering, Brno University of Technology. The technique is well suited for characterization of samples non–uniform along their surfaces. The technique is primarily used for optical characterization of thin films. First part of the work is focused on basic physical principles of the technique and on ways in which measurement data are obtained. It contains a basic description of evaluating methods and a basic concept of an imaging spectroscopic reflectometer with a description of main parts of such a device. The main part of the work is focused on a description of two devices which were built at The Institute of Physical Engineering together with a description of some of upgrades which were implemented to these devices during their development. A description of measurements done with the two devices is also included. Last part of the work is then focused on further development of the technique. Intention of possible evolution of the technique to imaging spectroscopic ellipsometry is proposed