Optimisation of polishing processes by using iTIRM for in-situ monitoring of surface quality

The possibilities of iTIRM, an in-process surface measurement tool, are explored in this research. Experiments are done to test the applicability for qualifying and optimising finishing processes for optical surfaces. Several optical glasses, different polishing agents and ductile grinding are included in these experiments. It is concluded that iTIRM can be used for both mentioned applications but that it is, at least for now, an R&D tool only and not applicable in production