Simulation-Based ‘Smart’ Operation Management System for Semiconductor Manufacturing

Part 2: Open Cloud Computing Architecture for Smart Manufacturing and Cyber Physical Production SystemsInternational audiencePresented in this paper is a framework of a simulation-based ‘smart’ operation management system (OMS) for semiconductor manufacturing. Also described are changes in the semiconductor market environment and key modules in the smart OMS. The proposed smart OMS is being implemented for a couple of IC chip makers in Korea