Fast response and high sensitivity ZnO/glass surface acoustic wave humidity sensors using graphene oxide sensing layer.

We report ZnO/glass surface acoustic wave (SAW) humidity sensors with high sensitivity and fast response using graphene oxide sensing layer. The frequency shift of the sensors is exponentially correlated to the humidity change, induced mainly by mass loading effect rather than the complex impedance change of the sensing layer. The SAW sensors show high sensitivity at a broad humidity range from 0.5%RH to 85%RH with < 1 sec rise time. The simple design and excellent stability of our GO-based SAW humidity sensors, complemented with full humidity range measurement, highlights their potential in a wide range of applications.This work was supported by NSFC (Nos. 61274037, 61274123, and 61474099) and the Zhejiang Provincial NSF (Nos. Z11101168 and LR12F04001). The authors also would like to acknowledge the financial support by the Innovation Platform of Micro/Nano devices and Integration System, Zhejiang University. TH wishes to acknowledge funding from the Royal Academy of Engineering. YX thanks the award from China Scholarship Council (CSC), Scholarship of Cyber Innovation Joint Research Center, Support by the Fundamental Research Funds for the Central Universities (2014XZZX006), and Fellowship from Churchill College at University of Cambridge.This is the final published version of the article. It originally appeared at http://www.nature.com/srep/2014/141126/srep07206/full/srep07206.html