Advanced scanning probe lithography and its parallelization

Nanofabrication is the process of making functional structures with arbitrary patterns having nanoscale dimensions. Nanofabrication has been widely implemented in industry for improving microelectronic devices and data storage technology, to increase the component density, to lower the cost and to increase the performance. Other areas of applications include optics, cell biology and biomedicine. One of the most critical challenges in the development of next generation nanoscale devices is the rapid, parallel, precise and robust fabrication of nanostructures. In this thesis work, we demonstrate the possibility to parallelize the thermochemical nanolithography (TCNL) by creating nanoscale patterns with a tip array, containing five identical thermal cantilevers. The versatility of our technique is demonstrated by creating nanopatterns simultaneously on multiple surfaces, including graphene oxide and conjugated polymers. This work also involves the study of the reduction process of graphene fluoride through TCNL and the study of the local anodic oxidation of epitaxial graphene, to create high quality graphene nanoribbons.Ph.D