Ultrapräzise Fertigung von Metalloptiken basierend auf hochphosphorhaltigen Chemisch Nickel-Schichten

Electroless Nickel enables the realization of ultra- precisely manufactured metal optics. For this, a thermally matched aluminum material is coated with > 150μm electroless nickel [3]. In opposite to poly- crystalline metals, the functional layer allows local shape correction and polishing [I, 2J. The amorphous layer of electroless nickel is turned ultra-pre-cisely and the shape of the metal optics is corrected by magnetorheological finishing (MRF) [4, 5]. Aiming at a lower micro roughness, a chemical-mechanical polishing is useful [2J. Finally, a thin high-reflective layer is deposited on the optical surface [6], The shown process chain provides cryogenic metal optics aiming at instrumentations for large reflecting telescopes and space applications [3, 4]